The InfraScanTM 400TDM is the newest evolution of Checkpoint’s pioneering top-down laser scanning and emission tools. This tool is specifically designed to accommodate any commercially available probe station, up to 300 mm wafers. The combination of Checkpoint Technologies, world leading laser scanning microscope and its best in class emission system into a single tool, gives users the most sensitive and easy to use system on the market. The TDM can be configured with up to 3 lasers and a choice of InGaAs, MCT or Si CCD emission cameras.
The InfraScanTM ES400 family provides the groundbreaking combination of Checkpoint Technologies, world leading laser scanning microscope and its best in class emission system into a single tool. This combination tool allows Checkpoint customers to configure the tool with either laser scanning only, emission only or the combination of the two. Best of all, the upgrade path to a complete combination tool is easy for future expansion at the customer’s site. Lastly, the ES400 can be fitted with Checkpoint’s proprietary industry leading Solid Immersion Lens objective.
Checkpoint Technologies’ laser probing tool, the InfraScan™ LTM (Laser Timing Module), employs a cw laser to optically probe circuit node to produce electronic waveforms. Checkpoint Technologies’ stabilized laser source and optical-to-electronic conversion module provides high bandwidth optical probing up to 12 GHz. The LTM can be integrated into an existing InfraScan™ product such as an INV or TDE or installed as a stand alone system.
The LTM option does not affect the ability of an INV or TDE to perform PEM and LSM studies on your samples.