Visible Laser Probing (VLP)

Checkpoint has developed a visible laser-probing module that is compatible with its InfraScan™ product family. Checkpoint’s visible laser probing leverages its industry leading LTM™ and Solid Immersion Lens – SIL technology, allowing its users to debug the latest circuit designs at the 10 nm node with the potential for utilization down to 5 nm node.

Checkpoint has demonstrated the Vis-SIL and Visible LTM on 10 nm to 16 nm circuits.  Preforming clear resolution improvement on 16 nm IC’s, compared to a near IR SIL, greater than a factor of two while maintaining signal to noise to extract clear electrical waveforms and signal mapped images (SMI’s).